Impact of a nonideal metal gate on surface optical phonon-limited mobility in high-κ gated MOSFETs

IEEE Transactions on Electron Devices

Volumn 54, Issue 11, 2007, Pages 2991-2997

  Shah, Raheel ^a   De Souza, Maria Merlyne ^a,b  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Metal gate; Mobility; MOSFET; Surface optical (SO) phonons

Indexed keywords

CARRIER CONCENTRATION; GATES (TRANSISTOR); PERMITTIVITY; PHONON SCATTERING;

GATE INSULATOR; LANDAU DAMPING; METAL GATE; SURFACE OPTICLA MOBILITY;

MOSFET DEVICES;

EID: 36248991844     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.907135     Document Type: Article

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