On the mobility in high-κ/metal gate MOSFETs: Evaluation of the high-κ phonon scattering impact

Solid-State Electronics

Volumn 50, Issue 4, 2006, Pages 626-631

  Weber, Olivier ^a,b   Cassé, Mikael ^a   Thevenod, Laurent ^a   Ducroquet, Frédérique ^a,b   Ernst, Thomas ^a   Deleonibus, Simon ^a  

^a CEA LETI   (France)

^b IMEP LAHC   (France)

Author keywords

High dielectric; Mobility; MOSFET; Phonon scattering

Indexed keywords

ELECTRON MOBILITY; GATES (TRANSISTOR); INTERFACES (MATERIALS); LIGHT SCATTERING; PHONONS; SILICON COMPOUNDS;

COULOMB SCATTERING; HIGH DIELECTRICS; MOBILITY; PHONON SCATTERING;

MOSFET DEVICES;

EID: 33646508741     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.03.034     Document Type: Article

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