A 2D nano-positioning system with sub-nanometric repeatability over the millimetre displacement range

Measurement Science and Technology

Volumn 18, Issue 11, 2007, Pages 3267-3272

  Chassagne, L ^a   Wakim, M ^a   Xu, S ^a   Topcu S ^a   Ruaux, P ^a   Juncar, P ^b   Alayli, Y ^a  

^a LABORATOIRE DES SCIENCES DU CLIMAT ET DE L ENVIRONNEMENT   (France)

^b Bioinformatique et Chimie Moléculaire   (France)

Author keywords

Heterodyne laser interferometry; Metrology; Nano scale positioning control method

Indexed keywords

DISTANCE MEASUREMENT; LITHOGRAPHY; NANOTECHNOLOGY; SENSORS;

HETERODYNE LASER INTERFEROMETRY; NANO-SCALE POSITIONING CONTROL METHOD;

POSITION CONTROL;

DISTANCE MEASUREMENT; LITHOGRAPHY; NANOTECHNOLOGY; POSITION CONTROL; SENSORS;

EID: 36248984190     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/11/001     Document Type: Article

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