A novel long-travel piezoelectric-driven linear nanopositioning stage

Precision Engineering

Volumn 30, Issue 1, 2006, Pages 85-95

  Chu, Chih Liang ^a   Fan, Sheng Hao ^a  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Flexure hinge; Micropositioner; Nanopositioning stage; Piezoelectric actuator

Indexed keywords

AMPLIFICATION; DEFORMATION; ELECTRIC POTENTIAL; INTERFEROMETERS; LASER BEAMS; NANOSTRUCTURED MATERIALS; SCANNING;

FLEXURE HINGE; MICROPOSITIONER; NANOPOSITIONING STAGE; PIEZOELECTRIC ACTUATOR;

PIEZOELECTRIC DEVICES;

EID: 27844436559     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.05.002     Document Type: Article

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