Estimation and correction method for the two-dimensional positionerrors of a planar XY stage based on motion error measurements

International Journal of Machine Tools and Manufacture

Volumn 46, Issue 7-8, 2006, Pages 801-810

  Hwang, Jooho ^a,b   Park, Chun Hong ^a   Lee, Chan Hong ^a   Kim, Seung Woo ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Diagonal measurement; Perpendicular error; Planar XY stage; Straightness error; Two dimensional position error; Yaw error

Indexed keywords

INTERFEROMETERS; LINEAR MOTORS; MOTION ESTIMATION;

DIAGONAL MEASUREMENT; PERPENDICULAR ERROR; PLANAR XY STAGE; STRAIGHTNESS ERROR; TWO-DIMENSIONAL POSITION ERROR; YAW ERROR;

ERROR CORRECTION;

EID: 33645052237     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.07.021     Document Type: Article

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