Nonlinearity in measurements of length by optical interferometry

Measurement Science and Technology

Volumn 7, Issue 1, 1996, Pages 62-68

  Wu, Chien Ming ^a,b   Su, Ching Shen ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002086653     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/1/009     Document Type: Article

References (9)

1. Quenelle R C 1983 Nonlinearity in interferometer measurements Hewlett Packard J. 34 10
2. Sutton CM 1987 Nonlinearity in length measurements using heterodyne laser Michelson interferometry J. Phys. E: Sci. Instrum. 20 1290-2
3. Rosenbluth A E and Bobroff N 1990 Optical sources of nonlinearity in heterodyne interferometers Precision Eng. 12 7-11
4. Heydeman Peter L M 1981 Determination and correction of quadrature fringe measurement error in interferometers Appl. Opt. 20 3382-4
5. Augustyn W and Davis P 1990 An analysis of polarization mixing errors in distance measuring interferometers J. Vac. Sci. Technol. B 8 2032-6
6. Bobroff N 1987 Residual errors in laser interferometry from air turbulence and nonlinearity Appl. Opt. 26 2676-81
7. Hou W and Wilkening G 1992 Investigation and compensation of the nonlinearity of heterodyne interferometers Precision Eng. 14 91-8
8. Freitas J M De and Player M A 1993 Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry Meas. Sci. Technol. 4 1173-6
9. Bobroff N 1993 Recent advances in displacement measuring interferometry Meas. Sci. Technol. 4 907-26