SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 9, 2005, Pages 1771-1777

Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics

Author keywords

Dimensional metrology; Heterodyne laser interferometry; High frequency clocks

Indexed keywords

ACTUATORS; INTERFEROMETRY; LASER APPLICATIONS; NANOTECHNOLOGY; NETWORKS (CIRCUITS); OPTOELECTRONIC DEVICES; PHASE SHIFT; PIEZOELECTRIC DEVICES;

DIMENSIONAL METROLOGY; HETERODYNE LASER INTERFEROMETRY; HIGH FREQUENCY CLOCKS; PIEZOELECTRIC ACTUATOR;

POSITION CONTROL;

MEASUREMENT METHOD; NANOTECHNOLOGY;

EID: 24144469767 PISSN: 09570233 EISSN: 09570233 Source Type: Journal
DOI: 10.1088/0957-0233/16/9/008 Document Type: Article

Times cited : (31)

References (11)

1
- 0344945669
- Heterodyne interferometric technique for displacement control at the nanometric scale
- Topcu S, Chassagne L, Haddad D, Alayli Y and Juncar P 2003 Heterodyne interferometric technique for displacement control at the nanometric scale Rev. Sci. Instrum. 74 4876-80
- (2003) Rev. Sci. Instrum. , vol.74 , Issue.11 , pp. 4876-4880
- Topcu, S.¹ Chassagne, L.² Haddad, D.³ Alayli, Y.⁴ Juncar, P.⁵

2
- 0032119598
- High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics
- Demarest F C 1998 High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics Meas. Sci. Technol. 9 1024-30
- (1998) Meas. Sci. Technol. , vol.9 , Issue.7 , pp. 1024-1030
- Demarest, F.C.¹

3
- 0027659135
- An updated Edlén equation for the refractive index of air
- Birch K P and Downs M J 1993 An updated Edlén equation for the refractive index of air Metrologia 30 155-62
- (1993) Metrologia , vol.30 , Issue.3 , pp. 155-162
- Birch, K.P.¹ Downs, M.J.²

4
- 0027662910
- Recent advances in displacement measuring interferometry
- Bobroff N 1993 Recent advances in displacement measuring interferometry Meas. Sci. Technol. 4 907-26
- (1993) Meas. Sci. Technol. , vol.4 , Issue.9 , pp. 907-926
- Bobroff, N.¹

5
- 0002674964
- Hou W and Wilkening G 1992 Prec. Eng. 14 91-6
- (1992) Prec. Eng. , vol.14 , Issue.2 , pp. 91-96
- Hou, W.¹ Wilkening, G.²

6
- 13944263279
- Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques
- Topcu S, Chassagne L, Alayli Y and Juncar P 2005 Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques Opt. Commun. 247 133-9
- (2005) Opt. Commun. , vol.247 , Issue.1-3 , pp. 133-139
- Topcu, S.¹ Chassagne, L.² Alayli, Y.³ Juncar, P.⁴

7
- 0007241420
- Picotto C G B and Sacconi A 1991 Conf. Proc.-Quantum Electronics and Plasma Physics vol 29 pp 361-5
- (1991) Conf. Proc.-Quantum Electronics and Plasma Physics , vol.29 , pp. 361-365
- Picotto, C.G.B.¹ Sacconi, A.²

8
- 0025022793
- Rosenbluth A E and Bobroff N 1990 Prec. Eng. 12 7-10
- (1990) Prec. Eng. , vol.12 , Issue.1 , pp. 7-10
- Rosenbluth, A.E.¹ Bobroff, N.²

9
- 33645583929
- Patterson S and Beckwith J 1995 8th IPES Conf. (Compiegne) pp 101-4
- (1995) 8th IPES Conf. (Compiegne) , pp. 101-104
- Patterson, S.¹ Beckwith, J.²

10
- 9144254577
- Highest-accuracy interferometer alignment by retroreflection scanning
- Schödele R and Bönsch G 2004 Highest-accuracy interferometer alignment by retroreflection scanning Appl. Opt. 43 5738-43
- (2004) Appl. Opt. , vol.43 , Issue.31 , pp. 5738-5743
- Schödele, R.¹ Bönsch, G.²

11
- 84897386934
- Statistics of atomic frequency standards
- Allan D W 1966 Statistics of atomic frequency standards Proc. IEEE 54 221-30
- (1966) Proc. IEEE , vol.54 , pp. 221-230
- Allan, D.W.¹

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