Heterodyne interferometric technique for displacement control at the nanometric scale

Review of Scientific Instruments

Volumn 74, Issue 11, 2003, Pages 4876-4880

  Topcu, Suat ^a   Chassagne, Luc ^a   Haddad, Darine ^a   Alayli, Yasser ^a   Juncar, Patrick ^b  

^a LABORATOIRE DES SCIENCES DU CLIMAT ET DE L ENVIRONNEMENT   (France)

^b Unité de Recherches Mesures Physiques Métrologie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL OSCILLATORS; FREQUENCY SYNTHESIZERS; HETERODYNING; INTERFEROMETERS; LIGHT POLARIZATION; MIXER CIRCUITS; NANOTECHNOLOGY; OPTICAL BEAM SPLITTERS;

DISPLACEMENT CONTROL;

POSITION CONTROL;

EID: 0344945669     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1614858     Document Type: Article

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