Characterization of application-specific probes for SPMs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 53-60

  Tortonese, Marco ^a   Kirk, Michael ^a  

^a Park Scientific Instruments   (United States)

Author keywords

Atomic force microscopy; Cantilevers; Force constant; Microfabrication; Micromachining

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; COMPOSITE MICROMECHANICS; MACHINING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING;

ATOMIC FORCE MICROSCOPE (AFM); CANTILEVERS; FORCE CONSTANT; NON-LINEAR; PAPER ADDRESSES; SPRING CONSTANTS;

NANOCANTILEVERS;

EID: 58749086215     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271229     Document Type: Conference Paper

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