Symmetric AFM cantilever for mechanical characterization of Mo thin film

International Journal of Modern Physics B

Volumn 20, Issue 25-27, 2006, Pages 3781-3786

  Lee, Hak Joo ^a   Kim, Jae Hyun ^a   Cho, Kiho ^a   Kang, Jae Yoon ^a   Baek, Chang Wook ^b   Kim, Jong Man ^c   Choa, Sung Hoon ^d  

^a Korea Institute of Machine and Materials   (South Korea)

^b Chung Ang University   (South Korea)

^c Seoul National University   (South Korea)

^d Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Atomic force microscope (AFM); Mechanical characterization; Molybdenum (Mo); Rhombus shaped cantilever; Strip bending test; Thin film

Indexed keywords

EID: 33751265169     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979206040362     Document Type: Conference Paper

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