Piezoresistive cantilever as portable micro force calibration standard

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Behrens, Ingo ^a   Doering, Lutz ^b   Peiner, Erwin ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; FINITE ELEMENT METHOD; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON SENSORS; STIFFNESS; STRAIN GAGES;

PIEZORESISTIVE DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0038441770     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/325     Document Type: Conference Paper

References (8)

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