Accurate force measurement in the atomic force microscope: A microfabricated array of reference springs for easy cantilever calibration

Nanotechnology

Volumn 14, Issue 8, 2003, Pages 918-924

  Cumpson, Peter J ^a   Hedley, John ^b   Zhdan, Peter ^c  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; FORCE MEASUREMENT; MICROMACHINING; NATURAL FREQUENCIES; POLYCRYSTALLINE MATERIALS; POLYSILICON; SPRINGS (COMPONENTS);

CANTILEVER SPRINGS; NANONEWTON FORCES; PICONEWTON FORCES; POLYMER SURFACES; REFERENCE SPRINGS;

NANOTECHNOLOGY;

EID: 0041864075     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/14/8/314     Document Type: Article

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