Facility and methods for the measurement of micro and nano forces in the range below 10-5 N with a resolution of 10-12 N (development concept)

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 360-366

  Nesterov, Vladimir ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Difference measurement; Disc pendulum; Electrostatic stiffness reduction; Electrostatic system; Micro force; Nano force; Seismic noise; Thermal noise; Traceability of the smallest forces

Indexed keywords

DEFLECTION (STRUCTURES); ELECTROSTATICS; SPURIOUS SIGNAL NOISE; STIFFNESS; THERMAL NOISE;

DIFFERENCE MEASUREMENT; ELECTROSTATIC STIFFNESS REDUCTION; ELECTROSTATIC SYSTEM; MICRO-FORCE; NANO-FORCE;

FORCE MEASUREMENT;

DEFLECTION (STRUCTURES); ELECTROSTATICS; FORCE MEASUREMENT; SPURIOUS SIGNAL NOISE; STIFFNESS; THERMAL NOISE;

EID: 34247214021     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S06     Document Type: Conference Paper

References (21)

1. Fischbach E, Sudarsky D, Szafer A and Talmadge C 1986 Reanalysis of the Eötvös experiment Phys. Rev. Lett. 56 3-6
2. Niebauer T M, McHugh M P and Faller J E 1987 Galilean test for the fifth force Phys. Rev. Lett. 59 609-12
3. Kramar J A, Newell D B and Pratt J R 2002 NIST Electrostatic Force Balance Experiment Proc. IMEKO, VDI Reports 1685 pp 71-6
4. Pratt J R, Newell D B, Williams E R, Smith D T and Kramar J A 2001 Towards a traceable nanoscale force standard Proc. 2nd Int. Conf. European Soc. for Precision Engineering and Nanotechnology (EUSPEN) (Turin, Italy, 27-31 May) pp 470-3
5. Pratt J R, Newell D B and Kramar J A 2002 A flexure balance with adjustable restoring torque for nanonewton force measurement Proc. IMEKO 2002, VDI Reports 1685 pp 77-82
6. Leach R K, Oldfield S and Georgakopoulos D 2006 Traceable nanonewton force measurement at the National Physical Laboratory, UK Proc. Euspen pp 414-7
7. Doering L and Brand U 2001 Si-cantilevers with integrated piezo resistive elements as micro force transfer standards Proc. NanoScale 2001, PTB Report pp 185-92
8. Peiner E, Doering L and Nesterov V 2004 Tactile Probes for High Aspect Ratio Micrometrology mstnews international newsletter on MICROSYSTEMS and MEMS vol 4 pp 38-40
9. Doering L, Peiner E, Nesterov V and Brand U 2004 Low noise piezoresistive micro force sensor Proc. NanoScale 2004 (Braunschweig, 25-26 March) pp 157-70
10. Doering L, Brand U, Peiner E, Frühauf J and Gärtner E 2003 Development of micro force setting standards for stylus instruments Proc. Euspen vol 2 pp 407-10
11. Doering L, Peiner E, Behrens I and Brand U 2003 Calibration of micro force setting standards using a new nano force calibration device Proc. Micro System Technologies MST pp 492-4
12. Stowe T D, Yasumura K, Kenny T W, Botkin D, Wago K and Rugar D 1997 Attonewton force detection using ultrathin silicon cantilevers Appl. Phys. Lett. 71 288-90
13. Holzapfel W, Kobusch M, Neuschaefer-Rube S and Hou L 1999 Dynamic testing of laser force transducers Proc. IMEKO XV World Congress (Osaka, Japan, June) vol 3 pp 159-66
14. Nesterov V, Pornnoppadol P, Brand U, Wilke R, Schmidt M and Büttgenbach S 2003 A novel three-axis silicon probe with integrated circuit on chip for microsystem components Proc. SPIE 2003: Conf. Smart Sensors, Actuators and MEMS vol 5116 pp 844-9
15. Nesterov V, Pornnoppadol P and Brand U 2003 Metrological characterization of a new three-axis piezoresistive micro probe Proc. Euspen pp 391-4
16. Nesterov V and Brand U 2006 Modelling and investigation of the mechanical and electrical characteristics of the silicon 3D-boss microprobe for force and deflection measurements J. Micromech. Microeng. 16 1116-27
17. Nolting F, Schurr J, Schlamminger S and Kündig W 1999 Die Gravitationskonstante-eine Herausforderung an die Messtechnik Phys. Bl. 55 51-3
18. Michaelis W, Haars H and Augustin R 1995/96 A new precise determination of Newton's gravitational constant Metrologia 32 267-76
19. Hamilton C A 2000 Josephson voltage standards Rev. Sci. Instrum. 71 3611-23
20. Bendat J S and Piersol A G 1993 Engineering Applications of Correlation and Spectral Analysis 2nd edn (New York: Wiley) p 458
21. Agnew D C 1986 Strainmeters and tiltmeters Rev. Geophys. 24 579-624