Electron transport coefficients in O2 magnetron discharges

Journal of Physics D: Applied Physics

Volumn 38, Issue 7, 2005, Pages 997-1004

  White, R D ^a   Robson, R E ^b   Ness, K F ^a   Makabe, T ^c  

^a JAMES COOK UNIVERSITY   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; ELECTROMAGNETIC FIELDS; MAGNETRONS; MATHEMATICAL MODELS; OXYGEN; TENSORS; VECTORS;

BOLTZMANN EQUATION; BULK ELECTRONS; FLUID MODELING; MOMENTUM TRANSFER;

ELECTRON TRANSITIONS;

EID: 17444383486     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/7/006     Document Type: Article

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