Numerical study of the characteristics of erosion in magnetron sputtering

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 359-365

  Kusumoto, Y ^a   Iwata, K ^a  

^a ULVAC INC   (Japan)

Author keywords

Erosion; Fitting function; Magnetron sputter; PIC MCC; Simulation

Indexed keywords

ARGON; CATHODES; COMPUTER SIMULATION; EROSION; FLUXES; IONS; MAGNETIC FIELD EFFECTS; MONTE CARLO METHODS; NUMERICAL METHODS; PLASMAS; PRESSURE EFFECTS;

FITTING FUNCTIONS; ION FLUX DISTRIBUTION; PARTICLE IN CELL MONTE CARLO COLLISION (PIC MCC);

MAGNETRON SPUTTERING;

EID: 2442419506     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.013     Document Type: Article

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