Monte Carlo simulations of the transport of sputtered particles

Computer Physics Communications

Volumn 120, Issue 2, 1999, Pages 238-254

  Macàk, Karol ^a   Macàk, Peter ^a   Helmersson, Ulf ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; GLOW DISCHARGES; INTERFACES (MATERIALS); KINETIC ENERGY; MAGNETRON SPUTTERING; PARTICLES (PARTICULATE MATTER); SPUTTER DEPOSITION;

BIERSACK'S POTENTIAL; BINARY HARD SPHERE COLLISION APPROXIMATION; CHAMBER GLOW DISCHARGES; LENNARD-JONES POTENTIAL; NEUTRAL PARTICLE TRANSPORT;

MONTE CARLO METHODS;

EID: 0033177694     PISSN: 00104655     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0010-4655(99)00245-3     Document Type: Article

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