Elastic-plastic characterization of thin films using nanoindentation technique

Thin Solid Films

Volumn 437, Issue 1-2, 2003, Pages 176-181

  Shan, Zhaohui ^a   Sitaraman, Suresh K ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Mechanical property; Nanoindentation; Thin film; Titanium

Indexed keywords

ELASTIC MODULI; ELASTICITY; FINITE ELEMENT METHOD; INDENTATION; PLASTICITY; STRAIN HARDENING; TENSILE TESTING; TITANIUM; YIELD STRESS;

ELASTIC-PLASTIC CHARACTERIZATION;

THIN FILMS;

EID: 0038785610     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00663-1     Document Type: Article

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