Crystallization and phase transformations in amorphous NiTi thin films for microelectromechanical systems

Applied Physics Letters

Volumn 85, Issue 7, 2004, Pages 1146-1148

  Lee, Hoo Jeong ^a   Ramirez, Ainissa G ^a  

^a Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROGRAPHS; MICROELECTROMECHANICAL SYSTEMS; MICROVALVES; SILICON MEMBRANES;

CALORIMETRY; CRYSTALLIZATION; ION EXCHANGE MEMBRANES; MARTENSITIC TRANSFORMATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; NUCLEATION; SHAPE MEMORY EFFECT; SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

NICKEL ALLOYS;

EID: 4444259298     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1783011     Document Type: Article

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