Combined IR and XPS analysis of the native (100) surface of single-crystalline silicon after HFaq etching

Surface and Interface Analysis

Volumn 39, Issue 10, 2007, Pages 836-844

  Cerofolini, G F ^a   Giussani, A ^a,c   Fabiani, F Carone ^a,d   Modelli, A ^a   Mascolo, D ^a   Ruggiero, D ^a   Narducci, D ^b   Romano, E ^b  

^a STMICROELECTRONICS   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

^c IHP   (Germany)

^d Innovations for High Performance Microelectronics ^*

Author keywords

Angle resolved XPS; MIR IR; Silicon surface

Indexed keywords

ETCHING; SINGLE CRYSTAL SURFACES; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

ETCHED SURFACES; HETEROGENEOUS DISTRIBUTION; SILICON SURFACES;

SILICON;

EID: 35348949952     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2599     Document Type: Article

References (39)

1. Waltenburg HN, Yates JT. Chem. Rev. 1995; 95: 1589.
2. Ubara H, Imura T, Hiraki A. Solid State Commun. 1984; 50: 673.
3. Dumas P, Chabal YJ, Jacob P. Surf. Sci. 1992; 269/270: 867.
4. Niwano M, Kimura J, Miyamoto N. Appl Phys. Lett. 1994; 65: 1692.
5. Niwano M, Kageyama J, Kinashi K, Takashi I, Miyamoto N. J. Appl. Phys. 1994; 76: 2157.
6. Mende G, Finster J, Flamm D, Schulze D. Surf. Sci. 1983; 128: 169.
7. Morita M, Ohmi T, Hasegawa E, Kawakami M, Ohwada M. J. Appl Phys. 1990; 68: 1272.
8. Cerofolini GF, Galati C, Reina S, Renna L, Spinella N, Condorelli GG. Phys. Rev. B 2006; 74: 235407.
9. Himpsel FJ, McFeely FR, Taleb-Ibrahimi A, Yarno JA, Hollinger G. Phys. Rev. B 1988; 38: 6084.
10. Usada K, Kanaya H, Yamada K, Sao T, Sueyoshi T, Iwatsuki M. Appl. Phys. Lett. 1994; 94: 3240.
11. Kawase K, Tanimura J, Kurokawa H, Wakao K, Inoue M, Umeda H, Teramoto A. J. Electrochem. Soc. 2005; 152: G163.
12. Cerofolini GF, Galati C, Renna L, Viscuso O, Camalleri M, Lorenti S, Condorelli GG, Fragalá L. J. Phys. D: Appl. Phys. 2002; 35: 1032.
13. Cerofolini GF, Galati C, Renna L. Surf. Interface Anal 2002; 34: 583.
14. Weldon MK, Queeney KT, Gurevich AB, Stefanof BB, Chabal YJ, Raghachavari K. J. Chem. Phys. 2000; 113: 2440.
15. Bellamy LJ. The Infra-red Spectra of Complex Molecules. Methuen & Co.: London, 1958.
16. Sugita Y, Watanabe S. Jpn. J. Appl Phys., Part 11998; 37: 3272.
17. Devlin JP, Sadley J, Buch V. J. Phys. Chem. A 2001; 105: 974.
18. Chabal YJ, Harris AL, Raghavachari K, Tully JC. Int. J. Mod. Phys. B 1993; 7: 1031.
19. Weldon MK, Chabal YJ, Hamann DR, ChristmanSB, Chaban EE, Feldmann LC. J. Vac. Sci. Technol., B 1996; 14: 3095.
20. Yahyaoui F, Dittrich T, Aggour M, Chazalviel JN, Ozanam F, Rappich J. J. Electrochem. Soc. 2003; 150: B205.
21. Cerofolini GF, Galati C, Reina S, Renna L, Spinella N, Jones D, Palermo V. Phys. Rev. B 2005; 72: 125431.
22. Kumagai Y, Namba K, Komeda T, Nishioka Y. J. Vac. Sci. Technol., A 1998; 16: 1775.
23. Cotton FA, Wilkinson G. Advanced Inorganic Chemistry (5th edn), chap. 3 John Wiley & Sons: New York, 1988.
24. Steele WA. The Interaction of Gases with Solid Surfaces, chap. 5. Pergamon Press: Oxford, 1974.
25. Cerofolini GF, Meda L. Appl. Phys. A 1996; 68: 29.
26. Forney D, Jacox ME, Thompson WE. J. Chem. Phys. 1993; 98: 841.
27. Chaban GM, Gerber RB. Spectrochim. Acta, Part A 2002; 58: 887.
28. Li GP, Hamilton IP. Chem. Phys. Lett. 2003; 368: 236.
29. Andrews L, Johnson GL. J. Phys. Chem. 1984; 88: 425.
30. Karlsson CJ, Owman F, Landemark E, Chao Y-C, Uhrberg RIG. Phys. Rev. Lett. 1994; 72: 4145.
31. Uhrberg RIG, Landemark E, Chao Y-C. J. Electron Spectrosc. 1995; 75: 197.
32. Cerofolini GF, Galati C, Renna L. Surf. Interface Anal. 2003; 35: 968.
33. Shioji M, Shiraishi T, Takahashi K, Nohira H, Azuma K, Nakata Y, Takata Y, Shin S, Kobayashi K, Hattori T. Appl. Phys. Lett. 2004; 84: 3756.
34. Cumpson PJ. J. Electron Spectrosc. Relat. Phenom. 1995; 72: 25.
35. Lu ZH, McCaffrey JP, Brar B, Wilk GD, Wallance RM, Feldman LC, Tay SP. Appl. Phys. Lett. 1997; 71: 2764.
36. Takahashi K, Nohira H, Hirose K, Hattori T. Appl. Phys. Lett. 2003; 83: 3422.
37. Chu W-K, Mayer JW, Nicolet M-A, Backscattering Spectrometry. Academic Press: Orlando, 1978; Table 8.3.
38. Cerofolini GF, Calì D, Galati C, Reina S, Renna L, Spinella N. Surf. Interface Anal 2005; 37: 683.
39. Cerofolini GF, Meda L. Appl. Surf. Sci. 1995; 89: 351.