Evaluation of the 3D compositional heterogeneity effect on line-edge-roughness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6519, Issue PART 2, 2007, Pages

  Kang, Shuhui ^a   Wu, Wen Li ^a   Prabhu, Vivek M ^a   Vogt, Bryan D ^a   Lin, Eric K ^a   Turnquest, Karen ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL COMPOSITION FLUCTUATION; DEPROTECTION GRADIENT;

COMPOSITION EFFECTS; COMPUTER SIMULATION; DIFFUSION; PARAMETER ESTIMATION; PHOTORESISTS; REACTION RATES;

SURFACE ROUGHNESS;

EID: 35148867127     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712682     Document Type: Conference Paper

References (23)

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