Characterization of compositional heterogeneity in chemically amplified photoresist polymer thin films with infrared spectroscopy

Macromolecules

Volumn 40, Issue 5, 2007, Pages 1497-1503

  Kang, Shuhui ^a   Vogt, Bryan D ^a,c   Wu, Wen Li ^a   Prabhu, Vivek M ^a   VanderHart, David L ^a   Rao, Ashwin ^a   Lin, Eric K ^a   Turnquest, Karen ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

^c Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITIONAL HETEROGENEITY; METHACRYLIC ACID (MAA); SPATIAL HETEROGENEITY;

CATALYSIS; DIMERIZATION; HYDROGEN BONDS; INFRARED SPECTROSCOPY; ORGANIC ACIDS; PHOTORESISTS;

THIN FILMS;

EID: 33947278977     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma062579c     Document Type: Article

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