Nitrogen dissociation degree in the diffusion region of a helicon plasma source obtained by atomic lines to molecular band intensities ratio

Journal of Applied Physics

Volumn 102, Issue 5, 2007, Pages

  Biloiu, Costel ^a   Scime, Earl E ^b   Biloiu, Ioana A ^b   Sun, Xuan ^c  

^a VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

^b WEST VIRGINIA UNIVERSITY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; MOLECULAR BEAM EPITAXY; NITROGEN; OPTICAL EMISSION SPECTROSCOPY;

ATOMIC LINES; ELECTRON ENERGY DISTRIBUTION; LANGMUIR PROBE MEASUREMENTS; MOLECULAR BANDS; VIBRATIONAL DISTRIBUTION;

INDUCTIVELY COUPLED PLASMA;

EID: 34548603033     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2777998     Document Type: Article

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