Atomic nitrogen production in a high efficiency microwave plasma source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 152-155

  McCullough, R W ^a   Geddes, J ^a   Croucher, J A ^a   Woolsey, J M ^b   Higgins, D P ^a   Schlapp, M ^c   Gilbody, H B ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b UNIVERSITY OF STIRLING   (United Kingdom)

^c JUSTUS LIEBIG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030558679     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579912     Document Type: Article

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