Development of a compact nitrogen radical source by helicon-wave discharge employing a permanent magnet

Thin Solid Films

Volumn 386, Issue 2, 2001, Pages 243-247

  Sasaki, K ^a   Kokubu, H ^a   Hayashi, D ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Helicon wave; High degree of dissociation; Nitrogen radical source; Permanent magnet

Indexed keywords

CARRIER CONCENTRATION; DISSOCIATION; ELECTRIC DISCHARGES; GALLIUM NITRIDE; HELICONS; PERMANENT MAGNETS;

NITROGEN RADICAL SOURCES;

NITROGEN;

EID: 0035874168     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01650-3     Document Type: Article

References (14)

1. Formation of carbon nitride films by reactive high-density plasma sputtering with excitation of m = 0 mode helicon wave