Determination of the atomic nitrogen flux from a radio frequency plasma nitride source for molecular beam epitaxy systems

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3434-3437

  Voulot, D ^a   McCullough, R W ^a   Thompson, W R ^a   Burns, D ^a   Geddes, J ^a   Cosimini, G J ^b   Nelson, E ^b   Chow, P P ^b   Klaassen, J ^b  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b SVT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032346195     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581498     Document Type: Article

References (7)

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6. W. L. Wiese, M. W. Smith, and B. M. Glennon, Atomic Transition Probabilities (National Bureau of Standards, Gaithersburg, MD, 1966), Vol. 1.
7. R. W. B. Pearse and A. G. Gaydon, The Identification of Molecular Spectra (Wiley, New York, 1963).