An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B3∏ g → A 3Σu+)

Journal of Applied Physics

Volumn 101, Issue 7, 2007, Pages

  Biloiu, Costel ^a,b   Sun, Xuan ^a   Harvey, Zane ^a   Scime, Earl ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND PEAK RATIO METHOD; GAS TEMPERATURE; NITROGEN DOPED DISCHARGES; NITROGEN PLASMAS;

DOPING (ADDITIVES); HELICONS; MATHEMATICAL MODELS; NITROGEN COMPOUNDS; PLASMAS; SPECTRUM ANALYSIS;

TEMPERATURE MEASUREMENT;

EID: 34247214584     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2537448     Document Type: Article

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