Nanoelectromechanical devices for sensing applications

Sensors and Actuators, B: Chemical

Volumn 126, Issue 1, 2007, Pages 24-34

  Cimalla, V ^a   Niebelschutz F ^a   Tonisch, K ^a   Foerster, Ch ^a   Brueckner, K ^a   Cimalla, I ^a   Friedrich, T ^b   Pezoldt, J ^a   Stephan, R ^a   Hein, M ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

MEMS; NEMS resonator; Quality factor; Sensor; Viscous damping

Indexed keywords

ENERGY GAP; RESONATORS; SENSORS; ULTRAFAST PHENOMENA; VACUUM APPLICATIONS; VISCOUS FLOW;

NEMS RESONATORS; QUALITY FACTORS; SENSING PROPERTIES; VISCOUS DAMPING;

NEMS;

EID: 34548502693     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.10.049     Document Type: Article

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