Electromechanical resonances of SiC and AlN beams under ambient conditions

35th European Microwave Conference 2005 - Conference Proceedings

Volumn 3, Issue , 2005, Pages 1531-1534

  Brueckner, K ^a   Forster Ch ^a   Tonisch, K ^a   Cimalla, V ^a   Ambacher, O ^a   Stephan, R ^a   Blau, K ^a   Hein, M A ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL RESONANCES; MEMS RESONATORS; PERMANENT MAGNETIC FIELDS; RESONANT RESPONSE;

ALUMINUM COMPOUNDS; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; PERMANENT MAGNETS; RESONATORS; SENSORS; SILICON CARBIDE; VOLTAGE CONTROL; WAVE FILTERS;

PARTICLE BEAMS;

EID: 33745480204     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1610243     Document Type: Conference Paper

References (16)

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