Group III-nitride and SiC based micro- And nanoelectromechanical resonators for sensor applications

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 7, 2006, Pages 1829-1833

  Forster Ch ^a   Cimalla, V ^a   Lebedev, V ^a   Pezoldt, J ^a   Brueckner, K ^a   Stephan, R ^a   Hein, M ^a   Aperathitis, E ^b   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

INDUCTIVE COUPLED PLASMA (ICP); NANOELECTROMECHANICAL RESONATORS; RESONATOR BEAMS;

ELECTRON CYCLOTRON RESONANCE; EPITAXIAL GROWTH; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; NITRIDES; RESONATORS; SILICON CARBIDE;

SILICON SENSORS;

EID: 33745107562     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200565232     Document Type: Article

References (7)

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7. Ch. Förster, Ph.D. Thesis, Mikro- und Nanoelektromechanische Resonatoren für die Sensorik, TU Ilmenau (2005).