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Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 194-202

A novel electromagnetic elastomer membrane actuator with a semi-embedded coil

Author keywords

Electromagnetic; Membrane; Micropump; PDMS; Planar coil

Indexed keywords

ACTUATORS; CONTROLLABILITY; PNEUMATICS; POLYDIMETHYLSILOXANE; POLYMERIC MEMBRANES;

EID: 34548214658     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.003     Document Type: Article
Times cited : (45)

References (23)
  • 3
    • 0032092897 scopus 로고    scopus 로고
    • The dynamic micropump driven with screen printed PZT actuator
    • Koch M., Evans A.G.R., and Brunnschweiler A. The dynamic micropump driven with screen printed PZT actuator. J. Micromech. Microeng. 8 2 (1998) 119-122
    • (1998) J. Micromech. Microeng. , vol.8 , Issue.2 , pp. 119-122
    • Koch, M.1    Evans, A.G.R.2    Brunnschweiler, A.3
  • 4
    • 0031220895 scopus 로고    scopus 로고
    • Design and simulation of an electrostatic micropump for drug-delivery applications
    • Tarik B., Alain B., and Jean P.G. Design and simulation of an electrostatic micropump for drug-delivery applications. J. Micromech. Microeng. 7 3 (1997) 186-188
    • (1997) J. Micromech. Microeng. , vol.7 , Issue.3 , pp. 186-188
    • Tarik, B.1    Alain, B.2    Jean, P.G.3
  • 5
    • 0034830475 scopus 로고    scopus 로고
    • A self-filling micropump based on PCB technology
    • Wego A., and Pagel L. A self-filling micropump based on PCB technology. Sens. Actuators A 88 3 (2001) 220-226
    • (2001) Sens. Actuators A , vol.88 , Issue.3 , pp. 220-226
    • Wego, A.1    Pagel, L.2
  • 7
    • 0033079892 scopus 로고    scopus 로고
    • Development of stress-optimized shape memory microvalves
    • Kohl M., Skrobanek K.D., and Miyazaki S. Development of stress-optimized shape memory microvalves. Sens. Actuators A 72 3 (1999) 243-250
    • (1999) Sens. Actuators A , vol.72 , Issue.3 , pp. 243-250
    • Kohl, M.1    Skrobanek, K.D.2    Miyazaki, S.3
  • 8
    • 0035871465 scopus 로고    scopus 로고
    • Micro magnetic silicone elastomer membrane actuator
    • Khoo M., and Liu C. Micro magnetic silicone elastomer membrane actuator. Sens. Actuators A 89 3 (2001) 259-266
    • (2001) Sens. Actuators A , vol.89 , Issue.3 , pp. 259-266
    • Khoo, M.1    Liu, C.2
  • 9
    • 0141907969 scopus 로고    scopus 로고
    • A plastic micropump constructed with conventional techniques and materials
    • Bohm S., Olthuis W., and Bergveld P. A plastic micropump constructed with conventional techniques and materials. Sens. Actuators A 77 3 (2001) 223-228
    • (2001) Sens. Actuators A , vol.77 , Issue.3 , pp. 223-228
    • Bohm, S.1    Olthuis, W.2    Bergveld, P.3
  • 10
    • 0033741496 scopus 로고    scopus 로고
    • Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm
    • Jeong O.C., and Yang S.S. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm. Sens. Actuators A 83 1-3 (2000) 249-255
    • (2000) Sens. Actuators A , vol.83 , Issue.1-3 , pp. 249-255
    • Jeong, O.C.1    Yang, S.S.2
  • 11
    • 0034833238 scopus 로고    scopus 로고
    • Fabrication of TiNi shape memory micropump
    • Eiji M., and Takayuki M. Fabrication of TiNi shape memory micropump. Sens. Actuators A 88 3 (2001) 256-262
    • (2001) Sens. Actuators A , vol.88 , Issue.3 , pp. 256-262
    • Eiji, M.1    Takayuki, M.2
  • 12
    • 0030717928 scopus 로고    scopus 로고
    • X. Yang, Y.-C. Tai, C.-M. Ho, Micro bellow actuators, in: Proceedings of Transducers '97: Dig. Tech. Papers, International Conference on Solid-State Sensors and Actuators, Chicago, 16-19 June 1997, pp. 45-48.
  • 13
    • 9644259142 scopus 로고    scopus 로고
    • Fabrication and test of a micro electromagnetic actuator
    • Kim K.H., Yoon H.J., Jeong O.C., and Yang S.S. Fabrication and test of a micro electromagnetic actuator. Sens. Actuators A 117 1 (2005) 8-16
    • (2005) Sens. Actuators A , vol.117 , Issue.1 , pp. 8-16
    • Kim, K.H.1    Yoon, H.J.2    Jeong, O.C.3    Yang, S.S.4
  • 14
    • 0026370557 scopus 로고    scopus 로고
    • C.J. Van Mullem, K.J. Gabriel, H. Fujita, Large deflection performance of surface micromachined corrugated diaphragms, in: Proceedings of Transducers '91: Dig. Tech. Papers, International Conference on Solid-State Sensors and Actuators, San Francisco, 24-27 June 1991, pp. 1014-1017.
  • 15
    • 0037340987 scopus 로고    scopus 로고
    • A phase-change type micropump with aluminum flap valves
    • Sim W.Y., Yoon H.J., Jeong O.C., and Yang S.S. A phase-change type micropump with aluminum flap valves. J. Micromech. Microeng. 13 2 (2003) 286-294
    • (2003) J. Micromech. Microeng. , vol.13 , Issue.2 , pp. 286-294
    • Sim, W.Y.1    Yoon, H.J.2    Jeong, O.C.3    Yang, S.S.4
  • 16
    • 27544463821 scopus 로고    scopus 로고
    • C. Yamahata, F. Lacharme, J. Matter, S. Schnydrig, Y. Burri, M.A.M. Gijs, Electromagnetically actuated ball valve micropumps, in: Proceedings of Transducers '05: Dig. Tech. Papers, International Conference on Solid-State Sensors and Actuators, Seoul, Korea, 5-9 June 2005, pp. 192-196.
  • 17
    • 33750141644 scopus 로고    scopus 로고
    • H.-L. Yin, J. Hsieh, H.-H. Hsu, A novel elastomer membrane micropump with embedded coils for off-chip pumping applications, in: Proceedings of MEMS 2006: Dig. Tech. Papers, International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 22-26 January 2006, pp. 770-773.
  • 18
    • 4544350876 scopus 로고    scopus 로고
    • On-chip micro-electromagnets for magnetic-based bio-molecules separation
    • Ramadan Q., Samper V., Poenar D., and Yu C. On-chip micro-electromagnets for magnetic-based bio-molecules separation. J. Magn. Magn. Mater. 281 (2004) 150-172
    • (2004) J. Magn. Magn. Mater. , vol.281 , pp. 150-172
    • Ramadan, Q.1    Samper, V.2    Poenar, D.3    Yu, C.4
  • 19
    • 34548219784 scopus 로고    scopus 로고
    • D.K. Cheng, Field and Wave Electromagnetics 2/e, Addison Wesley Longman, Ch.6.
  • 20
    • 0030719702 scopus 로고    scopus 로고
    • A. Meckes, J. Behrens, W. Benecke, Electromagnetically driven microvalve fabricated in silicon, in: Proceedings of Transducers '97: Dig. Tech. Papers, International Conference on Solid-State Sensors and Actuators, Chicago, 16-19 June 1997, pp.821-824.
  • 22
    • 0043080404 scopus 로고    scopus 로고
    • Robust design of gas and liquid micropumps
    • Richter M., Linnemann R., and Woias P. Robust design of gas and liquid micropumps. Sens. Actuators A 68 3 (1998) 480-486
    • (1998) Sens. Actuators A , vol.68 , Issue.3 , pp. 480-486
    • Richter, M.1    Linnemann, R.2    Woias, P.3
  • 23
    • 78249278530 scopus 로고    scopus 로고
    • Y.-H. Lin, H.-L. Yin, Y.-Y. Hsu, Y.-C. Hu, H.-Y Chou, T.-H. Yang, SCREAM for multi-level moveable structures by inductively coupled plasma process, in: Proceedings of IMECE 2002: Dig. Tech. Papers, ASME International Mechanical Engineering Congress and Exposition, New Orleans, Louisiana 17-22 November 2002, IMECE2002-33382.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.