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Volumn , Issue , 1991, Pages 1014-1017

Large deflection performance of surface micromachined corrugated diaphragms

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS - DEFORMATION; ELASTICITY; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; SENSORS - SILICON SENSORS;

EID: 0026370557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (32)

References (7)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.