Large deflection performance of surface micromachined corrugated diaphragms

Transducers '91

Volumn , Issue , 1991, Pages 1014-1017

  van Mullem, C J ^a   Gabriel, K J ^a   Fujita, H ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS - DEFORMATION; ELASTICITY; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; SENSORS - SILICON SENSORS;

CORRUGATED DIAPHRAGMS; CORRUGATION QUALITY FACTOR; DIAPHRAGM DEFLECTION;

SENSORS;

EID: 0026370557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)