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Volumn , Issue , 1991, Pages 1014-1017
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Large deflection performance of surface micromachined corrugated diaphragms
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DIAPHRAGMS - DEFORMATION;
ELASTICITY;
MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD;
SENSORS - SILICON SENSORS;
CORRUGATED DIAPHRAGMS;
CORRUGATION QUALITY FACTOR;
DIAPHRAGM DEFLECTION;
SENSORS;
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EID: 0026370557
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (32)
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References (7)
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