Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 249-255

  Jeong, Ok Chan ^a   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; DIFFUSERS (FLUID); MACHINE VIBRATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NOZZLES; PUMPS;

THERMOPNEUMATIC MICROPUMPS;

MICROACTUATORS;

EID: 0033741496     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00392-1     Document Type: Article

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