Fabrication and test of a micro electromagnetic actuator

Sensors and Actuators, A: Physical

Volumn 117, Issue 1, 2005, Pages 8-16

  Kim, Ki Hoon ^a   Yoon, Hyeun Joong ^a   Jeong, Ok Chan ^a   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

Author keywords

Corrugated; Electromagnetic actuator; Flat; Parylene

Indexed keywords

ELECTROMAGNETISM; FINITE ELEMENT METHOD; MAGNETIC FLUX; PERMANENT MAGNETS; PNEUMATIC CONTROL;

CORE SUBSTRATES; ELECTROMAGNETIC ACTUATION; MAGNETIC FLUX DENSITY;

ACTUATORS;

EID: 9644259142     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.079     Document Type: Article

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