Electromagnetically driven microvalve fabricated in silicon

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 821-824

  Meckes, Andreas ^a   Behrens, Joerg ^a   Benecke, Wolfgang ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; FABRICATION; FINITE ELEMENT METHOD; MAGNETOELECTRIC EFFECTS; MICROMACHINING; PERMANENT MAGNETS; SILICON;

ELECTROMAGNETIC FORCE; MICROACTUATORS; MICROVALVES;

VALVES (MECHANICAL);

EID: 0030719702     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)