Micro magnetic silicone elastomer membrane actuator

Sensors and Actuators, A: Physical

Volumn 89, Issue 3, 2001, Pages 259-266

  Khoo, Melvin ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Magnetic actuation; Membrane; Microactuator; Permalloy; Silicone rubber

Indexed keywords

COMPUTER SIMULATION; ELASTOMERS; MAGNETIC FIELD EFFECTS; SILICONES;

ELASTOMER MEMBRANE ACTUATORS; MICROFLUIDIC SYSTEMS;

MICROACTUATORS;

EID: 0035871465     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00559-8     Document Type: Article

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