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Volumn 2006, Issue , 2006, Pages 770-773
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A novel elastomer membrane micropump with embedded coils for off-chip pumping applications
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Author keywords
[No Author keywords available]
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Indexed keywords
EMBEDDED SYSTEMS;
POLYMERIC MEMBRANES;
PRESSURE CONTROL;
RELIABILITY THEORY;
TIME VARYING SYSTEMS;
ELECTROMAGNETIC MEMBRANE;
EMBEDDED COILS;
MICROPUMP;
PUMPING VOLUME;
ELASTOMERS;
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EID: 33750141644
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (5)
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