A novel elastomer membrane micropump with embedded coils for off-chip pumping applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 770-773

  Yin, Hung Lin ^a   Hsieh, Jerwei ^a   Hsu, An Hsiu ^a  

^a Technology Research Inst   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EMBEDDED SYSTEMS; POLYMERIC MEMBRANES; PRESSURE CONTROL; RELIABILITY THEORY; TIME VARYING SYSTEMS;

ELECTROMAGNETIC MEMBRANE; EMBEDDED COILS; MICROPUMP; PUMPING VOLUME;

ELASTOMERS;

EID: 33750141644     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. D. J. Laser, and J. G. Santiago, "A Review of Micropumps", J. Micromech. Microeng., 14, pp. 35-64, 2004.
3. R. S. Ramsey, and J. M. Ramsey, "Generating Electrospray form Microchip Devices Using Electroosmotic Pumping", Anal. Chem., 73, pp. 1174-1178, 1997.
4. O. C. Jeong, and S. S. Yang, "Fabrication and Test of a Thermopneumatic Micropump with a Corrugated p+ Diaphragm", Sensors and Actuators A., 83, pp. 384-392, 2000.
5. K. S. Ryu, K. Shaikh, and C. Liu, "A Method of Monolithically Integrate Elastomer O-Rings On Parylene Membranes for Improved Valve Sealing", μTAS2003, California, October 5-9, 2003, pp. 343-346.