Micro bellow actuators

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 45-48

  Yang, Xing ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ETCHING; MICROELECTROMECHANICAL DEVICES; PNEUMATIC CONTROL EQUIPMENT; SILICON NITRIDE;

MICROBELLOW ACTUATORS; THERMOPNEUMATIC ACTUATION;

BELLOWS;

EID: 0030717928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)