Microgrippers: A case study for batch-compatible integration of MEMS with nanostructures

Nanotechnology

Volumn 18, Issue 37, 2007, Pages

  Sardan, O ^a,b   Erdem Alaca, B ^a   Yalcinkaya, A D ^a,c   Boggild P ^b   Tang, P T ^b   Hansen, O ^b  

^a KOÇ UNIVERSITY   (Turkey)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c BOGAZICI UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

END EFFECTORS; FABRICATION; LITHOGRAPHY; MEMS; SUBSTRATES;

BATCH-COMPATIBLE INTEGRATION; END-EFFECTOR GEOMETRY; MICROGRIPPERS; NANOSCALE OBJECTS;

GRIPPERS;

NANOMATERIAL; NANOWIRE;

ARTICLE; BATCH PROCESS; DEVICE; MICROELECTROMECHANICAL SYSTEM; MICROGRIPPER; NANOTECHNOLOGY; PRIORITY JOURNAL;

EID: 34548146068     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/37/375501     Document Type: Article

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