Employing thin-film delamination for the formation of shadow masks for nanostructure fabrication

Advanced Materials

Volumn 18, Issue 8, 2006, Pages 1059-1062

  Elbahri, Mady ^a   Rudra, Shiva K ^a   Wille, Sebastian ^a   Jebril, Seid ^a   Scharnberg, Michael ^a   Paretkar, Dadhichi ^a   Kunz, Rainer ^a   Rui, Huang ^a   Biswas, Abhijit ^a   Adelung, Rainer ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DELAMINATION; DEPOSITION; FRACTURE; MASKS; NANOSTRUCTURED MATERIALS;

CRITICAL ANGLE; DELAMINATED ZONES; NANOSTRUCTURE FABRICATION; SURFACE CRACK;

THIN FILMS;

EID: 33646553595     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200502187     Document Type: Article

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