Atomic force microscopy characterization of electromechanical properties of RF acoustic bulk wave resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 169-172

  San Paulo, A ^a   Liu, X ^a,b   Bokor, J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LATERAL RESOLUTION; LOCK-IN DETECTION; RESONANT MODES;

ACOUSTIC WAVES; ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL DEVICES; ENERGY UTILIZATION; FREQUENCIES; OPTICAL MICROSCOPY; RESONANCE;

RESONATORS;

EID: 3042825183     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2003.1189713     Document Type: Conference Paper

References (15)

1. G. Binnig, C.F. Quate, G. Gerber, "Atomic Force Microscope", Phys. Rev. Lett. 56, pp. 930-932, 1986.
2. D. Sarid, "Scanning Force Microscopy", Oxford Univ. Press, cop. New York [etc], 1994.
3. J.A. Christman et al., "Piezoelectric measurements with AFM", Appl. Phys. Lett. 73, pp. 3851-3853, 1998.
4. T. Hesjedal et al, "High resolution visualization of acoustic wave fields within SAW devices", Appl. Phys. Lett. 70, pp. 1372-1374, 1997.
5. F. Sthal and R. Bourquin, "Characterizing mechanical resonators by means of a Scanning Force Microscpy", Appl. Phys. Lett. 77, pp. 1792-1794, 2000.
6. T. Hesjedal and G. Behme. "High-resolution imaging of surface acoustic wave scattering", Appl. Phys. Lett. 78, pp. 1948-1950, 2000.
7. H. Safar et al., "Imaging of acoustic fields in bulk acoustic-wave thin film resonators", Appl. Phys. Lett. 77, pp. 136-138, 2000.
8. J.E. Graebner et al., "Dynamic visualization of subangstrom high-frequency surface vibrations", Appl. Phys. Lett. 78, pp. 159-161, 2001.
9. G.G. Fattinger and P. T. Tikka, "Modified Mach-Zender laser interferometer for probing bulk acoustic waves", Appl. Phys. Lett. 79, pp.290-293, 2001.
10. K. Telschow et al, "Full-field imaging of Acoustic Motion at Nanosecond time and Micron Length Scales", Proc. IEEE Ultrasonics Symposium, pp. 601-604, 2002.
11. th IEEE Symp. Frequency Control, pp. 135-138, 1994.
12. R. Ruby et al., "PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)", Electronics Lett. 35, pp. 794-795, 1999.
13. S. J. O'Shea et al., "Characterization of tips for conducting AFM", Rev. Sci. Instrum. 66, pp. 2508-2512, 1995.
14. R. Hickey et al, "Time and frequency response of two-arm micromachined thermal actuators", J. Micromech. Microeng. 13, pp 40-46, 2003.
15. J. D. Larson III et al, "Power Handling and Temperature Coefficient Studies in FBAR Duplexers for the 1900 MHz PCS Band", IEEE Ultrasonics Symp. 2000, pp. 869-874.