Channel-select micromechanical filters using high-K dielectrically transduced MEMS resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 894-897

  Chandrahalim, Hengky ^a   Weinstein, Dana ^a   Cheow, Lih Feng ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FILTERS; ELECTRIC IMPEDANCE; INSERTION LOSSES; PERMITTIVITY; Q FACTOR MEASUREMENT; RESONATORS;

MICROMECHANICAL FILTERS; PASS-BAND RIPPLES; SHEAR MODE RESONATORS; SILICON DEVICE LAYERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33750098608     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. Y. -W. Lin, et al, "Vibrating micromechanical resonators with solid dielectric capacitive-transducer 'gaps'," FCS 2005, Vancouver, Canada.
3. G. Piazza, et al, "Low motional resistance ring-shaped contour-mode AlN piezoelectric micromechanical resonators for UHF applications," MEMS 2005, p. 20-23.
4. H. Chandrahalim, et al, "Thickness shear mode vibrations in silicon bar resonators," Ultrasonics 2005, Rotterdam, The Netherlands.
5. R. D. Blevins, Formulas for natural frequency and mode shape, Krieger Publishing Co., Florida, (1979) p. 176.
6. R. Ruby, et al, "Ultra-miniature high-Q filters and duplexers using FBAR technology," ISSCC 2001, p.120-121.
7. G. Piazza, et al, "Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators," Transducers 2005, p. 2065-2068.