Hidden parameters in the plasma deposition of microcrystalline silicon solar cells

Journal of Materials Research

Volumn 22, Issue 7, 2007, Pages 1767-1774

  van den Donker, M N ^a,b   Rech, B ^a,c   Schmitz, R ^a   Klomfass, J ^a   Dingemans, G ^a   Finger, F ^a   Houben, L ^a   Kessels, W M M ^d   van den Sanden, M C M ^d  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Solland Solar Cells BV   (Netherlands)

^c HAHN MEITNER INSTITUT   (Germany)

^d EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DILUTION; FLOW OF GASES; FLOW RATE; HYDROGEN; MICROCRYSTALLINE SILICON; PLASMA DEPOSITION; SUBSTRATES; THERMAL GRADIENTS;

HYDROGEN DILUTION; PLASMA POWER; TOTAL GAS FLOW RATE;

SILICON SOLAR CELLS;

EID: 34547123333     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0226     Document Type: Conference Paper

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