Microcrystalline silicon deposited at high rate on large areas from pure silane with efficient gas utilization

Solar Energy Materials and Solar Cells

Volumn 91, Issue 6, 2007, Pages 495-502

  Strahm, B ^a   Howling, A A ^a   Sansonnens, L ^a   Hollenstein, Ch ^a   Kroll, U ^b   Meier, J ^b   Ellert, Ch ^b   Feitknecht, L ^c   Ballif, C ^c  

^a EPFL   (Switzerland)

^b Oerlikon Solar Lab SA   (Switzerland)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

c Si:H; High deposition rate; Large area; Pure silane; RF PECVD

Indexed keywords

COST EFFECTIVENESS; CRYSTALLINE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; PHOTOVOLTAIC CELLS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILANES; SOLAR CELLS;

ATOMIC HYDROGEN DENSITY; GAS UTILIZATION; HIGH DEPOSITION RATE; MICROCRYSTALLINE THIN FILMS;

THIN FILMS;

EID: 33847310396     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.10.024     Document Type: Article

References (28)

1. Meier J., Flückiger R., Keppner H., and Shah A. Appl. Phys. Lett. 65 (1994) 860
2. Shah A., Meier J., Buechel A., Kroll U., Steinhauser J., Meillaud F., Schade H., and Dominé D. Thin Solid Films 502 (2006) 292
3. Dorier J.-L., Hollenstein Ch., Howling A.A., and Kroll U. J. Vac. Sci. Technol. A 10 4 (1992) 1048
4. Schwarzenbach W., Howling A.A., Fivaz M., Brunner S., and Hollenstein Ch. J. Vac. Sci. Technol. A 14 1 (1996) 132
5. Yin Y., Bilek M.M.M., McKenzie D.R., Boswell R.W., and Charles C. Surf. Coatings Technol. 198 (2005) 379
6. A.A. Howling, L. Sansonnens, J. Ballutaud, F. Grangeon, T. Delachaux, Ch. Hollenstein, V. Daudrix, U. Kroll, in: 16th European Photovoltaic Solar Energy Conference, Glasgow UK, VB1, 2000, pp. 28-32.
7. van den Donker M.N., Rech B., Finger F., Kessels W.M.M., and van den Sanden M.C.M. Appl. Phys. Lett. 87 (2005) 263503
8. Roschek T., Rech B., Müller J., Schmitz R., and Wagner H. Thin Solid Films 451-452 (2004) 466
9. Feitknecht L., Meier J., Torres P., Zürcher J., and Shah A. Sol. Energy Mat. Sol. Cells 74 (2002) 539
10. Sheib M., Schröder B., and Oechsner H. J. Non-Cryst. Solids 198-200 (1996) 895
11. Strahm B., Howling A.A., Sansonnens L., and Hollenstein Ch. Plasma Sources Sci. Technol. 16 (2007) 80
12. Rech B., Repmann T., Wieder S., Ruske M., and Stephan U. Thin Solid Films 502 (1996) 300
13. Meier J., Kroll U., Spitznagel J., Benagli S., Roschek T., Pfanner G., Ellert C., Androutsopoulos G., Hügli A., Nagel M., Bucher C., Feitknecht L., Büchel G., and Büchel A. Proceedings of 31st IEEE Photovoltaic Specialist Conference, Orlando, USA (2005) 1464
14. Graf U., Meier J., Kroll U., Bailat J., Droz C., Vallat-Sauvain E., and Shah A. Thin Solid Films 427 (2003) 37
15. Mai Y., Klein S., Carius R., Wolff J., Lambertz A., Finger F., and Geng X. J. Appl. Phys. 97 (2005) 114913
16. Gordijn A., Rath J.K., and Schropp R.E.I. Prog. Photovoltaics 14 (2006) 305
17. Perrin J., Schmitt J., Hollenstein Ch., Howling A.A., and Sansonnens L. Plasma Phys. Controlled Fusion 42 (2000) B353
18. Sansonnens L., Howling A.A., and Hollenstein Ch. Plasma Sources Sci. Technol. 9 (2000) 205
19. Sansonnens L., Howling A.A., and Hollenstein Ch. Plasma Sources Sci. Technol. 7 (1998) 114
20. Droz C., Vallat-Sauvain E., Bailat J., Feitknecht L., Meier J., and Shah A. Sol. Energy Mat. Sol. Cells 81 (2004) 61
21. Shah A., Meier J., Vallat-Sauvain E., Wyrsch N., Kroll U., Droz C., and Graf U. Sol. Energy Mat. Sol. Cells 78 (2003) 469
22. Pinto N., Ficcadenti M., Morresi L., Murri R., Ambrosone G., and Coscia U. J. Appl. Phys. 96 (2004) 7306
23. Fukawa M., Suzuki S., Guo L., Kondo M., and Matsuda A. Sol. Energy Mat. Sol. Cells 66 (2001) 217
24. Qing-Song L., Zhi-Meng W., Xin-Hua G., Ying Z., and Jian-Ping X. Chin. Phys 14 11 (2005) 2342
25. Kočka J., Mates T., Stucklíková H., Stuchlík J., and Fekfar A. Thin Solid Films 501 (2006) 107
26. Y. Tatsumi, H. Ohsaki, Density of c-Si, a-Si and a-Si:H, in: EMIS Data Reviews Series, vol. 1, Properties of Amorphous Silicon, INSPEC, London, 1989, p. 467-470.
27. Rech B., Roschek T., Müller J., Wieder S., and Wagner H. Sol. Energy Mat. Sol. Cells 66 (2001) 267
28. Katsia E., Amanatides E., Mataras D., Soto A., and Voyiatzis G.A. Sol. Energy Mat. Sol. Cells 87 (2005) 157