메뉴 건너뛰기




Volumn 75, Issue 24, 2007, Pages

Structure and properties of computer-simulated fullerene-based ultralow- k dielectric materials

Author keywords

[No Author keywords available]

Indexed keywords


EID: 34347373482     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.75.245430     Document Type: Article
Times cited : (15)

References (59)
  • 1
    • 0004245602 scopus 로고    scopus 로고
    • Semiconductor Industry Association
    • Semiconductor Industry Association, The International Technology Roadmap for Semiconductors (1999); 2000 Update (2000); 2004 Update (2004); 2005 Edition (2005). URL http://www.itrs.net
    • (1999) The International Technology Roadmap for Semiconductors
  • 2
    • 33845944637 scopus 로고    scopus 로고
    • edited by S. P. Murarka, M. Eizenberg, and A. K. Sinha (Elsevier, Amsterdam
    • M. Eizenberg, in Interlayer Dielectrics for Semiconductor Technologies, edited by, S. P. Murarka,,, M. Eizenberg,, and, A. K. Sinha, (Elsevier, Amsterdam, 2003), p. 1.
    • (2003) Interlayer Dielectrics for Semiconductor Technologies , pp. 1
    • Eizenberg, M.1
  • 4
  • 5
    • 84904028041 scopus 로고    scopus 로고
    • edited by S. P. Murarka, M. Eizenberg, and A. K. Sinha (Elsevier, Amsterdam
    • E. Ong and A. Sinha, in Interlayer Dielectrics for Semiconductor Technologies, edited by, S. P. Murarka,,, M. Eizenberg,, and, A. K. Sinha, (Elsevier, Amsterdam, 2003), p. 409.
    • (2003) Interlayer Dielectrics for Semiconductor Technologies , pp. 409
    • Ong, E.1    Sinha, A.2
  • 10
    • 34347401116 scopus 로고    scopus 로고
    • edited by S. P. Murarka, M. Einzenberg, and A. H. Sinha (Elsevier Academic Press, Amsterdam
    • M. Einzenberg, in Interlayer Dielectrics for Semiconductor Technologies, edited by, S. P. Murarka,,, M. Einzenberg,, and, A. H. Sinha, (Elsevier Academic Press, Amsterdam, 2003), p. 5.
    • (2003) Interlayer Dielectrics for Semiconductor Technologies , pp. 5
    • Einzenberg, M.1
  • 15
    • 84961742972 scopus 로고    scopus 로고
    • Proceedings of the IEEE International Interconnect Technology Conference-2002 (IEEE Press, Piscataway, NJ
    • S. Ogawa, T. Nasuno, M. Egami, and A. Nakashima, in Proceedings of the IEEE International Interconnect Technology Conference-2002 (IEEE Press, Piscataway, NJ, 2002) p. 220.
    • (2002) , pp. 220
    • Ogawa, S.1    Nasuno, T.2    Egami, M.3    Nakashima, A.4
  • 16
    • 34347402142 scopus 로고    scopus 로고
    • Proceedings of IEEE International Interconnect Technology Conference-2001 (IEEE Press, Piscataway, NJ
    • Q. Han, W. Chen, C. Waldfried, O. Escorcia, N. M. Sbrockey, T. J. Bridgewater, E. S. Moyer, and I. Berry, in Proceedings of IEEE International Interconnect Technology Conference-2001 (IEEE Press, Piscataway, NJ, 2001) p. 171.
    • (2001) , pp. 171
    • Han, Q.1    Chen, W.2    Waldfried, C.3    Escorcia, O.4    Sbrockey, N.M.5    Bridgewater, T.J.6    Moyer, E.S.7    Berry, I.8
  • 17
    • 0033569683 scopus 로고    scopus 로고
    • SCIEAS 0036-8075 10.1126/science.286.5439.421
    • R. D. Miller, Science SCIEAS 0036-8075 10.1126/science.286.5439.421 286, 421 (1999).
    • (1999) Science , vol.286 , pp. 421
    • Miller, R.D.1
  • 21
    • 0032162553 scopus 로고    scopus 로고
    • MIGIEA 0927-796X 10.1016/S0927-796X(98)00012-6
    • T. Homma, Mater. Sci. Eng., R. MIGIEA 0927-796X 10.1016/S0927-796X(98) 00012-6 23, 243 (1998).
    • (1998) Mater. Sci. Eng., R. , vol.23 , pp. 243
    • Homma, T.1
  • 26
    • 34347393799 scopus 로고    scopus 로고
    • HYPERCHEM 7.52
    • HYPERCHEM 7.52, http://www.hyper.com/products/Professional/index.htm
  • 28
    • 0007638285 scopus 로고    scopus 로고
    • IJQCB2 0020-7608 10.1002/(SICI)1097-461X(1996)58:2<185::AID-QUA7>3. 0.CO;2-U
    • G. Seifert, D. Porezag, and T. Frauenheim, Int. J. Quantum Chem. IJQCB2 0020-7608 10.1002/(SICI)1097-461X(1996)58:2<185::AID-QUA7>3.0.CO;2-U 58, 185 (1996).
    • (1996) Int. J. Quantum Chem. , vol.58 , pp. 185
    • Seifert, G.1    Porezag, D.2    Frauenheim, T.3
  • 34
    • 0001303934 scopus 로고
    • CMPHC2 0301-0104 10.1016/0301-0104(82)87020-1
    • B. T. Thole and P. T. van Duijnen, Chem. Phys. CMPHC2 0301-0104 10.1016/0301-0104(82)87020-1 71, 211 (1982).
    • (1982) Chem. Phys. , vol.71 , pp. 211
    • Thole, B.T.1    Van Duijnen, P.T.2
  • 37
    • 84961974339 scopus 로고    scopus 로고
    • JCPSA6 0021-9606 10.1063/1.478729
    • D. M. Chipman, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.478729 110, 8012 (1999).
    • (1999) J. Chem. Phys. , vol.110 , pp. 8012
    • Chipman, D.M.1
  • 38
    • 33646423267 scopus 로고    scopus 로고
    • PLRAAN 1050-2947 10.1103/PhysRevA.73.054501
    • K. Zagorodniy, M. Taut, and H. Hermann, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.73.054501 73, 054501 (2006).
    • (2006) Phys. Rev. a , vol.73 , pp. 054501
    • Zagorodniy, K.1    Taut, M.2    Hermann, H.3
  • 39
    • 0000572926 scopus 로고
    • ADVMEW 0935-9648 10.1002/adma.19930051116
    • A. Hirsch, Adv. Mater. (Weinheim, Ger.) ADVMEW 0935-9648 10.1002/adma.19930051116 5, 859 (1993).
    • (1993) Adv. Mater. (Weinheim, Ger.) , vol.5 , pp. 859
    • Hirsch, A.1
  • 40
    • 9344227930 scopus 로고    scopus 로고
    • PRPSB8 0079-6700 10.1016/j.progpolymsci.2004.08.001
    • C. Wang, Z.-X. Guo, S. Fu, W. Wu, and D. Zhu, Prog. Polym. Sci. PRPSB8 0079-6700 10.1016/j.progpolymsci.2004.08.001 29, 1079 (2004).
    • (2004) Prog. Polym. Sci. , vol.29 , pp. 1079
    • Wang, C.1    Guo, Z.-X.2    Fu, S.3    Wu, W.4    Zhu, D.5
  • 44
    • 33749159152 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.72.012102
    • G. Seifert, A. N. Enyashin, and T. Heine, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.72.012102 72, 012102 (2005).
    • (2005) Phys. Rev. B , vol.72 , pp. 012102
    • Seifert, G.1    Enyashin, A.N.2    Heine, T.3
  • 49
    • 34347397686 scopus 로고    scopus 로고
    • edited by S. P. Murarka, M. Einzenberg, and A. H. Sinha (Elsevier Academic Press, Amsterdam
    • S. P. Murarka, in Interlayer Dielectrics for Semiconductor Technologies, edited by, S. P. Murarka,,, M. Einzenberg,, and, A. H. Sinha, (Elsevier Academic Press, Amsterdam, 2003), p. 168.
    • (2003) Interlayer Dielectrics for Semiconductor Technologies , pp. 168
    • Murarka, S.P.1
  • 50
    • 0345720252 scopus 로고
    • JACSAT 0002-7863 10.1021/ja00179a044
    • K. Miller, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja00179a044 112, 8533 (1990).
    • (1990) J. Am. Chem. Soc. , vol.112 , pp. 8533
    • Miller, K.1
  • 51
    • 33646371255 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.96.166801
    • B. Kozinsky and N. Marzari, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.96.166801 96, 166801 (2006).
    • (2006) Phys. Rev. Lett. , vol.96 , pp. 166801
    • Kozinsky, B.1    Marzari, N.2
  • 53
    • 0035886495 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.64.165408
    • J. M. Cabrera-Trujillo and J. Robles, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.64.165408 64, 165408 (2001).
    • (2001) Phys. Rev. B , vol.64 , pp. 165408
    • Cabrera-Trujillo, J.M.1    Robles, J.2
  • 56
  • 57
    • 1842531937 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.69.085106
    • I. Souza, J. Iniguez, and D. Vanderbilt, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.69.085106 69, 085106 (2004).
    • (2004) Phys. Rev. B , vol.69 , pp. 085106
    • Souza, I.1    Iniguez, J.2    Vanderbilt, D.3
  • 58
    • 0037048416 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.89.117602
    • I. Souza, J. Iniguez, and D. Vanderbilt, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.117602 89, 117602 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 117602
    • Souza, I.1    Iniguez, J.2    Vanderbilt, D.3
  • 59
    • 0037037908 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.89.157602
    • P. Umari and A. Pasquarello, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.157602 89, 157602 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 157602
    • Umari, P.1    Pasquarello, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.