In search of low-k dielectrics

Science

Volumn 286, Issue 5439, 1999, Pages 421-423

  Miller, Robert D ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; POLYMER; SILICIC ACID; SILICON DIOXIDE;

CHEMICAL PARAMETERS; FILM; MATERIALS; POLYMERIZATION; POROSITY; PRIORITY JOURNAL; SEMICONDUCTOR; SHORT SURVEY;

EID: 0033569683     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.286.5439.421     Document Type: Short Survey

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