Thermoelastic damping in bilayered micromechanical beam resonators

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 532-538

  Prabhakar, Sairam ^a   Vengallatore, Srikar ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MEMS; MICROMECHANICS; NATURAL FREQUENCIES; SILICON COMPOUNDS; THERMOELASTICITY;

EULER-BERNOULLI BEAM RESONATORS; MICROCANTILEVERS; THERMOELASTIC DAMPING (TED);

RESONATORS;

EID: 34249006603     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/016     Document Type: Article

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