Thermoelastic loss observed in a high Q mechanical oscillator

Physica B: Condensed Matter

Volumn 316-317, Issue , 2002, Pages 408-410

  Photiadis, D M ^a   Houston, B H ^a   Liu, Xiao ^b   Bucaro, J A ^a   Marcus, M H ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

Author keywords

Internal friction; MEMS; Oscillators; Silicon

Indexed keywords

ENERGY DISSIPATION; HIGH TEMPERATURE EFFECTS; INTERNAL FRICTION; MICROELECTROMECHANICAL DEVICES; POTENTIAL ENERGY; THERMOELASTICITY;

MICROELECTROMECHANICAL (MEMS) OSCILLATORS;

OSCILLATORS (MECHANICAL);

EID: 0036567575     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(02)00528-8     Document Type: Conference Paper

References (13)