Deposition of highly efficient microcrystalline silicon solar cells under conditions of low H2 Dilution: The role of the transient depletion induced incubation layer

Progress in Photovoltaics: Research and Applications

Volumn 15, Issue 4, 2007, Pages 291-301

  Van Den Donker, M N ^a   Rech, B ^a,c   Finger, F ^a   Houben, L ^a   Kessels, W M M ^b   Van De Sanden, M C M ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c HAHN MEITNER INSTITUT   (Germany)

Author keywords

Hydrogen dilution; Incubation layer; Microcrystalline silicon; Plasma enhanced chemical vapor deposition (PECVD); Solar cells; Thin film

Indexed keywords

DILUTION; HYDROGEN; MICROCRYSTALLINE SILICON; NUCLEATION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

CRYSTALLITE NUCLEATION; HYDROGEN DILUTION; INCUBATION LAYER; TRANSIENT DEPLETION;

SILICON SOLAR CELLS;

EID: 34248208121     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.743     Document Type: Article

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