Integrated silica micro-opto-electromechanical steering device for laser beam scanning

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 117-121

  Petroz, Karine ^a   Ollier, Eric ^a   Grateau, Henri ^b   Mottier, Patrick ^a  

^a CEA LETI   (France)

^b 38 054 Cedex 09   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLISION AVOIDANCE; ELECTROSTATICS; ETCHING; LASER BEAMS; MICROMACHINING; OPTICAL INSTRUMENT LENSES; OPTICS; SCANNING; SILICA; SUBSTRATES; TELEMETERING;

MICROOPTOELECTROMECHANICAL STEERING DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033537536     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00263-5     Document Type: Article

References (8)

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