Optical scanner using a MEMS actuator

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 176-184

  Zara, Jason M ^a   Smith, S W ^a  

^a DUKE UNIVERSITY   (United States)

Author keywords

Electrostatic microelectromechanical system; Integrated force array; Laser

Indexed keywords

ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; METALLIZING; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PLASTIC FILMS; POLYIMIDES; PROTECTIVE COATINGS; SCANNING; SILICON WAFERS;

OPTICAL SCANNERS;

MICROACTUATORS;

EID: 0036898697     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00302-3     Document Type: Article

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